Wire bonding apparatus and wire bonding method

ABSTRACT

A wire bonding apparatus comprising:
         a capillary configured to have inserted therethrough a wire;   a damper provided above the capillary and able to clamp hold the wire; and   a load sensor configured to measure load incurred on the wire.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority fromthe Japanese Patent Application No. 2006-291574, filed on Oct. 26, 2006,the entire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention is related to a wire bonding apparatus and a wirebonding method.

2. Related Art

There exists a wire bonding process, wherein an electrode on asemiconductor chip, and an inner lead formed on a wiring board or a leadframe are electrically connected with a thin metal line (a wire), aspart of a semiconductor device manufacturing process.

In the wire bonding process, first, a wire is melted by applying a highvoltage electric discharge to the wire (tail) protruding from a tip of acapillary, which forms a ball on the tip of the tail. Then, with theapplication of heat, pressure, and an ultrasonic oscillation, bonding ofthis ball and an electrode on a semiconductor chip is performed.

Afterward, this capillary is raised and moved atop an inner lead, andwith the application of heat, pressure, or an ultrasonic oscillation,bonding of the wire and the inner lead is performed. When the bonding iscomplete, the capillary is raised to a prescribed height, and the wireis cut by clamping the wire.

The wire cutting on the inner lead is termed the “tail cut action”, andby tail cutting, a tail of suitable length is left on the tip of thecapillary. Wire bonding is performed by carrying out the above describedseries of actions repeatedly.

In tail cutting, the bond strength of the inner lead and the wire mustbe just right. For example, in a case in which the bond strength of theinner lead and the wire is too weak, the wire will detach from the innerlead thus making it impossible to perform tail cutting.

On the other hand, in a case in which the bond strength of the innerlead and the wire is too strong, the wire will be severed at the top ofthe inner lead, and a tail of appropriate length will not be formed.There is a problem in that if there exists no tail of appropriatelength, a ball of correct shape would not be formed, whereby if wirebonding is attempted in such a state, the capillary and the electrode onthe semiconductor chip would come into direct contact and thereby damagethe semiconductor chip and the electrode.

In order to solve this problem, a device is proposed (For example, seeJapanese Patent Laid-Open No. 07-106365) that monitors and measures thelength of a tail left behind on a capillary tip after tail cutting.

Also, since a great breaking load is incurred on the wire at the time oftail cutting, a spring back phenomenon occurs after the cut, and thewire buckles (deforms). There is a problem in that since this deformedwire is used afterward in wire bonding, this deformed wire would come incontact with adjacent wire connections and create a short defect, thusreducing yield.

SUMMARY OF THE INVENTION

According to one aspect of the present invention, there is provided awire bonding apparatus comprising:

a capillary configured to have inserted therethrough a wire;

a damper provided above the capillary and able to clamp hold the wire;and

a load sensor configured to measure load incurred on the wire.

According to one aspect of the present invention, there is provided awire bonding apparatus comprising:

a capillary configured to have inserted therethrough a wire;

a transducer horn configured at one end to hold in place the capillary;

a damper provided above the capillary and able to clamp hold the wire;

a damper supporting portion that supports the damper at one end;

a capillary moving portion to which the other ends of the transducerhorn and the damper supporting portion are fixed and which is configuredto move the transducer horn and the damper supporting portion as one;and

a control apparatus that performs drive control of the capillary movingportion and the clamper, monitors an electric current value on thecapillary moving portion at a time of cutting of the wire, andcalculates load at a time of cutting of the wire based on the electriccurrent value.

According to one aspect of the present invention, there is provided awire bonding method comprising:

bonding a wire in order at a first bonding point and a second bondingpoint;

raising a capillary, through which the wire is inserted, on the secondbonding point;

cutting the wire by closing a damper provided above the capillary at atime when the capillary has reached a prescribed height;

measuring a load incurred on the wire at a time of cutting of the wire;

detecting whether the measured load is within a prescribed optimumbreaking load range; and

determining whether or not to continue bonding based on the detectionresult.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a view showing a schematic configuration of a wire bondingapparatus according to a first embodiment of the present invention;

FIG. 2 is a graph showing a relationship between breaking load and wiredeformation defect occurrence rate;

FIG. 3 is a view showing a wire bonding method according to the sameembodiment; and

FIG. 4 is a view showing a schematic configuration of a wire bondingapparatus according to a second embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Herein below, description, based on the FIGS., is given in regard to theembodiments of the present invention.

First Embodiment

FIG. 1 shows a view of a schematic configuration of a wire bondingapparatus according to a first embodiment of the present invention. Thewire bonding apparatus includes a capillary 2 configured to haveinserted therethrough with a wire 1, a damper 3 able to clamp hold thewire 1 disposed above the capillary 2, a transducer horn 4 configured atone end to hold in place the capillary 2, a load sensor 6 that measuresload incurred on the wire 1, a damper supporting portion 5 onto whichthe load sensor 6 is mounted and which supports the damper 3 at one end,a capillary moving portion 10 to which the other ends of the transducerhorn 4 and the damper supporting portion 5 are fixed and which isconfigured to move the capillary 2 and the damper 3 as one, and acontrol apparatus 20.

The capillary moving portion 10 includes a Z-axis drive portion 11configured to move the capillary 2 in a Z-axis direction perpendicularto a bonding subject 7, and an X-axis drive portion 12 and Y-axis driveportion 13 configured to move the capillary 2 in the directions of anX-axis and a Y-axis, which are two orthogonal directions in a planeparallel to a top surface of the bonding subject 7. The Z-axis driveportion 11, X-axis drive portion 12, and Y-axis drive portion 13 are,for example, servo motors.

The bonding subject 7 is for example an inner lead formed on a wiringboard or a lead frame. Also, in the so-termed reverse bonding in whichwire connection is performed from the inner lead to an electrode of thesemiconductor chip, reverse bonding is performed after a bump, usingwire, is formed on the chip electrode. Tail cutting action comes to beperformed at the time of this bump formation as well, thus in this casethe chip electrode is the bonding subject 7.

The control apparatus 20 includes an arithmetic processing portion 21, acontrol portion 22, and a memory 23. The memory 23 is externallyallotted with and stores a plurality of parameters such as controlparameters such as ultrasonic output strength and trajectory informationof the capillary 2 that defines a loop shape of the wire 1, andparameters such as the wire diameter of the wire 1.

The control portion 22 performs control of the movement of the capillarymoving portion 10, opening and shutting of the clamper 3, and control ofultrasonic energy given to the transducer horn at the time of bonding,based on the various parameters stored at the memory 23.

The arithmetic processing portion 21 calculates an optimum breaking loadrange based on the diameter of the wire 1, and performs determination ofwhether or not the breaking load at the time of wire cutting (tailcutting) measured by the load sensor 6 is within the optimum breakingload range. When it is determined that the breaking load is not withinthe optimum breaking load range, a stop signal is sent to the controlportion 22 in order to stop the apparatus. A warp gauge or the like maybe used as the load sensor 6.

A graph showing the relationship between the breaking load when using awire of a diameter of 23 μm and the wire deformation (S bending) defectoccurrence rate is shown in FIG. 2. It can be understood from this graphthat if the breaking load is set to 46 mN or less, the wire deformationdefect will not occur. The optimum breaking load range may be setarbitrarily by a user.

Also, wire bonding conditions in the case that the breaking load at thetime of tail cutting is within the optimum breaking load range, wirebonding conditions in the case that the breaking load at the time oftail cutting is not within the optimum breaking load range, wire bondingconditions in the case that a tail of appropriate length is not formeddue to the bond strength being too strong, and the like may be stored inthe memory 23.

By seeking wire bonding conditions at which the breaking load at tailcutting time is within the optimum breaking load range and a tail ofappropriate length is formed by the arithmetic processing portion 21referencing this information, it is possible to perform wire bonding atoptimum bonding conditions.

A wire bonding method (at the time of tail cutting) will be describedusing FIG. 3. First, as is shown in FIG. 3(A), the wire 1 is bonded withthe bonding subject 7. After bonding is complete, as is shown in FIG.3(B), the capillary 2 is moved (raised) in the Z-axis direction. Asshown in FIG. 3(C), when the capillary 2 has been raised to a prescribedheight, the damper 3 is shut, thereby cutting the wire 1.

The breaking load at this point in time is measured by the load sensor 6mounted on the damper supporting portion 5. Then, determination is madeby the arithmetic processing portion 21 in the control apparatus 20 asto whether or not the breaking load measured by the load sensor 6 iswithin the optimum breaking load range.

In a case in which it has been determined that the breaking load isoutside of the optimum breaking load range, the apparatus is stopped,and inspection is performed scrutinizing whether the wire 1 of thecapillary 2 has buckled. Accordingly, it is possible to prevent wirebonding that uses deformed wire.

In this manner, according to the wire bonding apparatus of the presentembodiment, it is possible to suppress wire deformation due to tailcutting action. Also, it is possible to prevent, in advance, wirebonding using deformed wire.

Second Embodiment

In FIG. 4, a schematic configuration of a wire bonding apparatusaccording to a second embodiment of the present invention is shown. Thewire bonding apparatus includes a capillary 102 configured to haveinserted therethrough with a wire 101, a damper 103 able to clamp holdthe wire 101 disposed above the capillary 102, a transducer horn 104configured at one end to hold in place the capillary 102, a dampersupporting portion 105 which supports the damper 103 at one end, acapillary moving portion 110 to which the other ends of the transducerhorn 104 and the damper supporting portion 105 are fixed and which isconfigured to move the capillary 102 and the damper 103 as one, and acontrol apparatus 120.

The capillary moving portion 110 includes a Z-axis drive portion 111configured to move the capillary 102 in a Z-axis direction perpendicularto a bonding subject 107, and an X-axis drive portion 112 and Y-axisdrive portion 113 configured to move the capillary 102 in the directionsof an X-axis and a Y-axis, which are two orthogonal directions in aplane parallel to a top surface of the bonding subject 107. The Z-axisdrive portion 111, X-axis drive portion 112, and Y-axis drive portion113 are, for example, servo motors.

The control apparatus 120 includes an arithmetic processing portion 121,a control portion 122, and a memory 123. The memory 123 is externallyallotted with and stores a plurality of parameters such as controlparameters such as ultrasonic output strength and trajectory informationof the capillary 102 that defines a loop shape of the wire 101, andparameters such as the wire diameter of the wire 101.

The control portion 122 performs control of the movement of thecapillary moving portion 110, opening and shutting of the damper 103,and control of ultrasonic energy given to the transducer horn 104 at thetime of bonding, based on the various parameters stored at the memory123.

The transducer horn 104 is connected to the Z-axis drive portion 111.According to the electric current value of the Z-axis drive portion 111,it is possible for the control portion 122 to control the load at thetime of bonding. Also, the control portion 122 monitors change in theelectric current generated in the Z-axis drive portion 111 when thetransducer horn 4 rises and wire cutting (tail cutting) is performed.This change in current is a value corresponding to the breaking load atthe time of tail cutting.

The arithmetic processing portion 121 calculates the breaking load ofthe wire 101 from the electric current value (at the time of tailcutting) monitored by the control portion 122. Also, the arithmeticprocessing portion 121 calculates an optimum breaking load range basedon the diameter of the wire 101, and performs determination of whetheror not the breaking load at the time of tail cutting is within thisoptimum breaking load range. When it is determined that the breakingload is not within the optimum breaking load range, a stop signal issent to the control portion 122 in order to stop the apparatus. Theoptimum breaking load range may be set arbitrarily by a user.

Also, wire bonding conditions in the case that the breaking load at thetime of tail cutting is within the optimum breaking load range, wirebonding conditions in the case that the breaking load at the time oftail cutting is not within the optimum breaking load range, wire bondingconditions in the case that a tail of appropriate length is not formeddue to the bond strength being too strong, and the like may be stored inthe memory 123.

By seeking wire bonding conditions at which the breaking load at tailcutting time is within the optimum breaking load range and a tail ofappropriate length is formed by the arithmetic processing portion 121referencing this information, it is possible to perform wire bonding atoptimum bonding conditions.

According to the wire bonding apparatus of the present embodiment, thebreaking load at the time of tail cutting is calculated based on anelectric current value of the Z-axis drive portion 111, and in a case inwhich the breaking load is not within the optimum breaking load rangethe apparatus is stopped. And according to inspection as to whether thewire 101 within the capillary 102 has buckled, it is possible to preventthe use of deformed wire in subsequent wire bonding.

In this manner, it is possible to suppress wire deformation due to tailcutting action. Also, it is possible to prevent, in advance, wirebonding using deformed wire. Also, since it is not necessary to use theload sensor that measures the breaking load as in the above describedfirst embodiment, it is possible to reduce the cost of the apparatus.

1. A wire bonding apparatus comprising: a capillary configured to haveinserted therethrough a wire; a damper provided above the capillary andable to clamp hold the wire; and a load sensor configured to measureload incurred on the wire.
 2. The wire bonding apparatus of claim 1further comprising: a transducer horn configured at one end to hold inplace the capillary; a damper supporting portion onto which the loadsensor is mounted and which supports the damper at one end; and acapillary moving portion to which other ends of the transducer horn andthe damper supporting portion are fixed and which is configured to movethe transducer horn and the damper supporting portion as one.
 3. Thewire bonding apparatus of claim 2 further comprising: a memory portionthat stores control parameters; a control portion that performs drivecontrol of the capillary moving portion and the damper based on thecontrol parameters; and an arithmetic processing portion configured toperform detection of whether or not a load at a time of cutting of thewire measured by the load sensor is within an optimum breaking loadrange, and send an apparatus stop signal to the control portion based ona result of the detection.
 4. The wire bonding apparatus according toclaim 3 wherein the memory portion stores wire diameter information ofthe wire, and the arithmetic processing portion calculates the optimumbreaking load range based on the wire diameter information of the wire.5. A wire bonding apparatus comprising: a capillary configured to haveinserted therethrough a wire; a transducer horn configured at one end tohold in place the capillary; a damper provided above the capillary andable to clamp hold the wire; a damper supporting portion that supportsthe damper at one end; a capillary moving portion to which the otherends of the transducer horn and the damper supporting portion are fixedand which is configured to move the transducer horn and the dampersupporting portion as one; and a control apparatus that performs drivecontrol of the capillary moving portion and the clamper, monitors anelectric current value on the capillary moving portion at a time ofcutting of the wire, and calculates load at a time of cutting of thewire based on the electric current value.
 6. The wire bonding apparatusof claim 5 wherein the capillary moving portion comprises a horizontaldirection drive portion configured to move the transducer horn and thedamper supporting portion in a horizontal direction, and a verticaldirection drive portion configured to move the transducer horn and thedamper supporting portion in a vertical direction, and the transducerhorn is connected to the vertical direction drive portion, and thecontrol apparatus monitors an electric current value of the verticaldirection drive portion at a time of cutting of the wire.
 7. The wirebonding apparatus of claim 5 wherein the control apparatus comprises: amemory portion that stores control parameters; a control portion thatperforms drive control of the capillary moving portion and the damperbased on the control parameters, and monitors an electric current valueon the capillary moving portion at a time of cutting of the wire; and anarithmetic processing portion configured to perform calculation of aload at a time of cutting of the wire based on the electric currentvalue, detection of whether or not the load is within an optimumbreaking load range, and sending of an apparatus stop signal to thecontrol portion based on a result of the detection.
 8. The wire bondingapparatus according to claim 7 wherein the memory portion stores wirediameter information of the wire, and the arithmetic processing portioncalculates the optimum breaking load range based on the wire diameterinformation of the wire.
 9. A wire bonding method comprising: bonding awire in order at a first bonding point and a second bonding point;raising a capillary, through which the wire is inserted, on the secondbonding point; cutting the wire by closing a damper provided above thecapillary at a time when the capillary has reached a prescribed height;measuring a load incurred on the wire at a time of cutting of the wire;detecting whether the measured load is within a prescribed optimumbreaking load range; and determining whether or not to continue bondingbased on the detection result.
 10. The wire bonding method of claim 9wherein the load incurred on the wire is measured by a load sensormounted on a damper supporting portion that supports the damper at oneend.
 11. The wire bonding method of claim 9 wherein an electric currentvalue of a capillary moving portion that moves a transducer horn thatsupports the capillary at one end is measured, and a load incurred onthe wire is calculated based on the electric current value.
 12. The wirebonding method of claim 9 wherein the prescribed optimum breaking loadrange is determined based on a wire diameter of the wire.